Ion implantation to reduce nanosheet gate length variation

ABSTRACT

Approaches herein decrease nanosheet gate length variations by implanting a gate layer material with ions prior to etching. A method may include forming a dummy gate structure over a nanosheet stack, the dummy gate structure including a hardmask atop a gate material layer, and removing a portion of the hardmask to expose a first area and a second area of the gate material layer. The method may further include implanting the dummy gate structure to modify the first and second areas of the gate material layer, and etching the first and second areas of the gate material layer to form a treated layer along a sidewall of a third area of the gate material layer, wherein the third area is beneath the hardmask.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation application of U.S. Non-Provisionalapplication Ser. No. 17/098,082, filed Nov. 13, 2020, entitled “IONIMPLANTATION TO REDUCE NANOSHEET GATE LENGTH VARIATION,” the entirecontents of which application is incorporated by reference herein.

FIELD OF THE DISCLOSURE

The present embodiments relate to semiconductor device patterning, andmore particularly, to techniques for implanting dummy gate layers withions to reduce nanosheet gate length variation by improving etchperformance.

BACKGROUND OF THE DISCLOSURE

As integrated circuit (IC) technologies progress towards smallertechnology nodes, multi-gate devices have been used to improve gatecontrol by increasing gate-channel coupling, reducing off-state current,and reducing short-channel effects (SCEs). A multi-gate device generallyrefers to a device having a gate structure, or portion thereof, disposedover more than one side of a channel region. Fin-like field effecttransistors (FinFETs) and gate-all-around (GAA) transistors, both alsoreferred to as non-planar transistors, are examples of multi-gatedevices that provide high performance and low leakage applications. AGAA transistor, e.g., a nanosheet transistor or a nanowire transistor,has a gate structure that can extend, partially or fully, around achannel region to provide access to the channel region on two or moresides. The channel region of the GAA transistor may be formed fromnanowires, nanosheets, or other nanostructures. However, integration ofdifferent multi-gate devices, including nanowire and/or nanosheettransistors, on one integrated circuit, is challenging and complex.

For active gate lengths less than 14 nm, gate length control is criticalfor stable electrostatic performance. This is especially true for 3/2 nmGAA transistors. Lateral etch rate differences, e.g., due to polysiliconcrystallization orientation, results in rough or non-uniform sidewallsurfaces, which leads to vertical profile distortion. As processingcontinues, a conformal spacer subsequently formed over the non-uniformsidewall surfaces inherits the vertical profile distortion, leading toinconsistent gate length patterning.

Accordingly, improved approaches are needed to control gate lengthvariation during processing.

SUMMARY

This Summary is provided to introduce a selection of concepts in asimplified form that are further described below in the DetailedDescription. This Summary is not intended to identify key features oressential features of the claimed subject matter, nor is it intended asan aid in determining the scope of the claimed subject matter.

In one aspect, a method may include forming a gate structure over ananosheet stack, the gate structure including a hardmask atop a gatematerial layer, and removing a portion of the hardmask to expose a firstarea and a second area of the gate material layer. The method mayfurther include implanting the gate structure to modify the first andsecond areas of the gate material layer, and etching the first andsecond areas of the gate material layer to form a treated layer along asidewall of a third area of the gate material layer, wherein the thirdarea is beneath the hardmask.

In another aspect, a method of reducing gate length variation mayinclude forming a dummy gate structure over a nanosheet stack, the dummygate structure including a hardmask atop a silicon layer, and removing aportion of the hardmask to expose a first area and a second area of thesilicon layer. The method may further include implanting the dummy gatestructure to modify the first and second areas of the silicon layer, andetching the first and second areas of the gate material layer to form atreated layer along a sidewall of a third area of the gate materiallayer, wherein the third area is beneath the hardmask.

In yet another aspect, a method of reducing lateral etch rate variationmay include forming a dummy gate structure over a nanosheet stack, thedummy gate structure including a hardmask atop a gate material layer,removing a portion of the hardmask to expose a first area and a secondarea of the gate material layer, and implanting the dummy gate structureto modify the first and second areas of the gate material layer. Themethod may further include etching the first and second areas of thegate material layer to form a treated layer along a sidewall of a thirdarea of the gate material layer, wherein the third area is beneath thehardmask. The method may further include forming a spacer along thetreated layer, and etching a portion of the nanosheet stack to form anactive gate beneath the third area of the gate material layer, wherein asidewall of the spacer is co-planar with a sidewall of the active gate.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings illustrate exemplary approaches of thedisclosure, including the practical application of the principlesthereof, as follows:

FIG. 1 illustrates a plan view of an exemplary device, according toembodiments of the present disclosure;

FIGS. 2A-2B illustrate formation of a nanosheet stack according toembodiments of the present disclosure;

FIGS. 3A-3B illustrate formation of a hardmask and a dummy gatestructure over the nanosheet stack according to embodiments of thepresent disclosure;

FIGS. 4A-4B illustrate patterning of the hardmask according toembodiments of the present disclosure;

FIGS. 5A-5B illustrate an ion implant to the dummy gate structureaccording to embodiments of the present disclosure;

FIGS. 6A-6B illustrate removal of a portion of the dummy gate structureaccording to embodiments of the present disclosure;

FIGS. 7A-7B illustrate formation of a spacer according to embodiments ofthe present disclosure; and

FIGS. 8A-8B illustrate removal of a portion of the nanosheet stackaccording to embodiments of the present disclosure.

The drawings are not necessarily to scale. The drawings are merelyrepresentations, not intended to portray specific parameters of thedisclosure. The drawings are intended to depict exemplary embodiments ofthe disclosure, and therefore are not be considered as limiting inscope. In the drawings, like numbering represents like elements.

Furthermore, certain elements in some of the figures may be omitted, orillustrated not-to-scale, for illustrative clarity. The cross-sectionalviews may be in the form of “slices”, or “near-sighted” cross-sectionalviews, omitting certain background lines otherwise visible in a “true”cross-sectional view, for illustrative clarity. Furthermore, forclarity, some reference numbers may be omitted in certain drawings.

DETAILED DESCRIPTION

Methods and devices in accordance with the present disclosure will nowbe described more fully hereinafter with reference to the accompanyingdrawings, where various embodiments are shown. The methods devices maybe embodied in many different forms and are not to be construed as beinglimited to the embodiments set forth herein. Instead, these embodimentsare provided so the disclosure will be thorough and complete, and willfully convey the scope of the methods to those skilled in the art.

Embodiments described herein advantageously reduce dummy gate CDvariation and improve nanosheet gate length uniformity by implanting ionspecies to form amorphized or heavy doped polysilicon, which leads tolateral poly gate etch rate variation reduction. In some embodiments,when heavy doping (e.g., 10²⁰ cm⁻³) of n-type ions (e.g., phosphorous,arsenic, antimony) is employed, nearly equal etch rates may be achievedregardless of crystalline orientation. In some embodiments, when siliconof the gate is amorphized, better post-etch surface roughness can beachieved on amorphous silicon (a-Si) vs. polysilicon because of theuniform a-Si structure. A pre-amorphization ion treatment process, e.g.,with Si, germanium (Ge), xenon (Xe), or indium (In) may be used in someembodiments.

FIG. 1 illustrates a plan view of a semiconductor device (hereinafter“device”) 100 according to one or more embodiments described herein. Thedevice 100 may include a nanosheet stack 102 and a dummy gate 104.Although non-limiting, the device 100 may be a GAA device structure, avertical GAA device structure, a horizontal GAA device structure, or afin field effect transistor (FinFET) device structure. When describingthe figures hereinafter, a figure suffixed “A” is a cross section of thepartially processed device 100 along line X-X′ in FIG. 1 and a figuresuffixed “B” is a cross section of the same partially processed device100 along line Y-Y′ in FIG. 1.

FIGS. 2A-2B demonstrate the device 100 following formation of thenanosheet stack 102. In some embodiments, the nanosheet stack 102 may beformed by depositing a series of alternating layers of silicon 106 andsilicon germanium 108 over a base layer 110, such as a silicon. An etchstop layer 112, such as silicon dioxide, may be formed over the baselayer 110 and over the alternating layers of silicon 106 and silicongermanium 108. In some embodiments, the nanosheet stack 102 may includea dielectric wall 109 (e.g., silicon dioxide). Other nanosheet stacklayering configurations and materials are possible in alternativeembodiments.

FIGS. 3A-3B demonstrate the device 100 following formation of a gatestructure 115 over the nanosheet stack 102. In some embodiments, thegate structure 115 is a dummy gate structure including a gate materiallayer 116 and a hardmask 118. As shown, the gate material layer 116 maybe formed atop the etch stop layer 112. In some embodiments, the gatematerial layer 116 may be an amorphous silicon (a-Si) or a polysilicon.The hardmask 118 may be conformally deposited over the gate materiallayer 116.

FIGS. 4A-4B demonstrate the device 100 following removal of a portion ofthe hardmask 118. As best shown in FIG. 4A, the hardmask 118 may beetched, selective to a top surface 120 of the gate material layer 116,to expose a first area 122 and a second area 124 of the gate materiallayer 116. The hardmask 118 may remain over a third area 126 of the gatematerial layer 116.

FIGS. 5A-5B demonstrate the device 100 following an ion implantation 130to the gate structure 115. Due to the presence of the hardmask 118, theion implantation 130 modifies the gate material layer 116 in the firstand second areas 122, 124 without substantially modifying the gatematerial layer 116 in the third area 126. In some embodiments, the ionimplantation 130 may include a high-mass/heavy doping (e.g., 10²⁰ cm⁻³)of n-type ions (e.g., phosphorous, arsenic, antimony). Other ion speciesare possible. Furthermore, in some embodiments, the ion implantation 130is an amorphization implant. As shown, the ion implantation 130 may bevertical, i.e., delivered at an angle substantially perpendicular to aplane defined by the top surface 120 of the gate material layer 116. Inother embodiments, the ion implantation 130 may be delivered at anangle.

In some embodiments, the ion implantation 130 may include one ormultiple implant processes to generate a first treated area 131 and asecond treated area 132. As shown, the first and second treated areas131, 132 may extend laterally, beneath the hardmask 118, e.g., bydistances ‘D1’ and ‘D2’, respectively. In various embodiments, D1 and D2may be different or the same.

In some embodiments, the gate material layer 116 may be treated with afirst species penetrating to a first depth or thickness, and a secondspecies penetrating to a second depth or thickness. For example, whenthe ion implantation 130 is an amorphization implant, the first processmay be a pre-amorphization ion treatment process, e.g., with Si, Ge, Xe,or In. The second process may be a Ge ion implant at approximately 30Kev, with a dose of approximately 10¹⁴. Embodiments herein are notlimited in this context, however.

The ion implantation energy, temperature, and ion dose of ionimplantation 130 may be selected to modify all or a portion of the firstand second areas 122, 124, which may extend to the etch stop layer 112.In some embodiments, the ion implantation 130 may homogenize the firsttreated area 131 and the second treated area 132 to eliminate or reducea chemical and mechanical gradient affecting the profile and etchingproperties. In other embodiments, the first treated area 131 and thesecond treated area 132 are densified following polymer reorganizationand reflow of gate material layer 116.

FIGS. 6A-6B illustrate the device 100 following removal of a portion ofthe dummy gate structure 115. As shown, the first and second areas 122,124 of the gate material layer 116 may be removed (e.g., etched)selective to the etch stop layer 112, while a treated layer 135 remainsalong a sidewall 138 of the third area 126 of the gate material layer116. In exemplary embodiments, the treated layer 135 is covered by thehardmask 118, which prevents it from being removed during the etchprocess. Due to the prior ion implantation 130, the treated layer 135provides a more smooth/uniform exterior surface.

FIGS. 7A-7B demonstrate a spacer 140 formed along the dummy gatestructure 115. More specifically, the spacer 140 may be conformallyformed along an exterior of the treated layer 135. As shown, the spacer140 may be formed along an entire height of the dummy gate structure115, e.g., between the etch stop layer 112 and a top surface 142 of thehardmask 118. In some embodiments, the spacer 140 is silicon dioxidedeposit having a smooth/uniform exterior surface profile due to thereduced roughness of the treated layer 135. Said differently, the spacer140 is less likely to inherit vertical profile distortion from thetreated layer 135, resulting in more consistent patterning during laterprocessing steps.

FIGS. 8A-8B demonstrate the device 100 following removal of a portion ofthe nanosheet stack 102 to form a nanosheet active gate 145. In someembodiments, a vertical etch process may remove those areas of thenanosheet stack 102 not covered/protected by the dummy gate structure115. More specifically, the third area 126 of the gate material layer116, the treated layer 135, and the spacer 140 act as a profiling maskfor nanosheet etching to control nanosheet active gate 145 length ‘GL’.As shown, GL is substantially equal to a dummy gate length ‘DGL’. Saidanother way, a sidewall 148 of the spacer 140 is substantially co-planarwith a sidewall 150 of the active gate 145 along an entire height of thenanosheet active gate 145 and the dummy gate structure 115.

For the sake of convenience and clarity, terms such as “top,” “bottom,”“upper,” “lower,” “vertical,” “horizontal,” “lateral,” and“longitudinal” will be used herein to describe the relative placementand orientation of components and their constituent parts as appearingin the figures. The terminology will include the words specificallymentioned, derivatives thereof, and words of similar import.

As used herein, an element or operation recited in the singular andproceeded with the word “a” or “an” is to be understood as includingplural elements or operations, until such exclusion is explicitlyrecited. Furthermore, references to “one embodiment” of the presentdisclosure are not intended as limiting. Additional embodiments may alsoincorporate the recited features.

Furthermore, the terms “substantial” or “substantially,” as well as theterms “approximate” or “approximately,” can be used interchangeably insome embodiments, and can be described using any relative measuresacceptable by one of ordinary skill in the art. For example, these termscan serve as a comparison to a reference parameter, to indicate adeviation capable of providing the intended function. Althoughnon-limiting, the deviation from the reference parameter can be, forexample, in an amount of less than 1%, less than 3%, less than 5%, lessthan 10%, less than 15%, less than 20%, and so on.

Still furthermore, one of ordinary skill will understand when an elementsuch as a layer, region, or substrate is referred to as being formed on,deposited on, or disposed “on,” “over” or “atop” another element, theelement can be directly on the other element or intervening elements mayalso be present. In contrast, when an element is referred to as being“directly on,” “directly over” or “directly atop” another element, nointervening elements are present.

In various embodiments, design tools can be provided and configured tocreate the datasets used to produce the void-free trench-fills describedherein. For example, data sets can be created to directionally etch aseed layer from predetermined portion of a trench and/or fin asdescribed herein. Such design tools can include a collection of one ormore modules and can also be comprised of hardware, software or acombination thereof. Thus, for example, a tool can be a collection ofone or more software modules, hardware modules, software/hardwaremodules or any combination or permutation thereof. As another example, atool can be a computing device or other appliance running software, orimplemented in hardware.

As used herein, a module might be implemented utilizing any form ofhardware, software, or a combination thereof. For example, one or moreprocessors, controllers, application-specific integrated circuits(ASICs), programmable logic arrays (PLAs), logical components, softwareroutines or other mechanisms might be implemented to make up a module.In implementation, the various modules described herein might beimplemented as discrete modules or the functions and features describedcan be shared in part or in total among one or more modules. In otherwords, as would be apparent to one of ordinary skill in the art afterreading the description, the various features and functionalitydescribed herein may be implemented in any given application.Furthermore, the various features and functionality can be implementedin one or more separate or shared modules in various combinations andpermutations. Although various features or elements of functionality maybe individually described or claimed as separate modules, one ofordinary skill in the art will understand these features andfunctionality can be shared among one or more common software andhardware elements.

The present disclosure is not to be limited in scope by the specificembodiments described herein. Indeed, other various embodiments of andmodifications to the present disclosure, in addition to those describedherein, will be apparent to those of ordinary skill in the art from theforegoing description and accompanying drawings. Thus, such otherembodiments and modifications are intended to fall within the scope ofthe present disclosure. Furthermore, the present disclosure has beendescribed herein in the context of a particular implementation in aparticular environment for a particular purpose. Those of ordinary skillin the art will recognize the usefulness is not limited thereto and thepresent disclosure may be beneficially implemented in any number ofenvironments for any number of purposes. Thus, the claims set forthbelow are to be construed in view of the full breadth and spirit of thepresent disclosure as described herein.

What is claimed is:
 1. A method, comprising: implanting a gate structure to modify first and second areas of a gate material layer; and etching the first and second areas of the gate material layer to form a treated layer along a sidewall of a third area of the gate material layer, wherein the third area is beneath a hardmask.
 2. The method of claim 1, further comprising: forming the gate structure over a nanosheet stack, the gate structure including the hardmask atop the gate material layer; and removing a portion of the hardmask to expose the first and second areas of the gate material layer.
 3. The method of claim 2, further comprising: forming a spacer along the treated layer; and removing a portion of the nanosheet stack to form an active gate, wherein a sidewall of the spacer is co-planar with a sidewall of the active gate.
 4. The method of claim 2, further comprising forming the treated layer beneath the hardmask.
 5. The method of claim 2, further comprising depositing a series of alternating layers of silicon and silicon germanium to form the nanosheet stack.
 6. The method of claim 5, further comprising forming an etch stop layer atop the series of alternating layers of silicon and silicon germanium, wherein the gate structure is formed over the etch stop layer.
 7. The method of claim 1, further comprising modifying the first and second areas of the gate material layer by amorphizing the first and second areas or by doping the first and second areas with ions of the implant.
 8. The method of claim 1, wherein implanting the gate structure comprises performing a vertical ion implant to the gate structure, wherein the gate material layer is amorphous silicon.
 9. A method of reducing gate length variation, comprising: forming a dummy gate structure over a nanosheet stack; implanting the dummy gate structure to modify first and second areas of a silicon layer of the nanosheet stack; and etching the first and second areas of the silicon layer to form a treated layer along a sidewall of a third area of the silicon layer, wherein the third area is beneath a hardmask, and wherein the hardmask is formed over the silicon layer.
 10. The method of claim 9, further comprising forming a spacer along the treated layer, wherein the spacer extends to a top surface of the dummy gate structure.
 11. The method of claim 10, further comprising removing a portion of the nanosheet stack to form an active gate, wherein a sidewall of the spacer is co-planar with a sidewall of the active gate.
 12. The method of claim 9, further comprising forming the treated layer beneath the hardmask.
 13. The method of claim 9, further comprising: depositing a series of alternating layers of silicon and silicon germanium to form the nanosheet stack; and forming an etch stop layer atop the series of alternating layers of silicon and silicon germanium, wherein the silicon layer is formed over the etch stop layer.
 14. The method of claim 9, further comprising removing a portion of the hardmask to expose a first area and a second area of the silicon layer.
 15. The method of claim 14, further comprising modifying the first and second areas of the silicon layer by amorphizing the first and second areas or by doping the first and second areas with n-type phosphorous ions, arsenic ions, or antimony ions.
 16. A method of reducing lateral etch rate variation, comprising: forming a gate structure over a nanosheet stack, the gate structure including a hardmask atop a gate material layer; removing a portion of the hardmask to expose a first area and a second area of the gate material layer, wherein the hardmask remains over a third area of the gate material layer; implanting the gate structure to modify the first and second areas of the gate material layer; and etching the first and second areas of the gate material layer to form a treated layer along a sidewall of the third area of the gate material layer.
 17. The method of claim 16, further comprising: forming a spacer along the treated layer; and etching the nanosheet stack to form an active gate beneath the third area of the gate material layer, wherein a sidewall of the spacer is co-planar with a sidewall of the active gate, and wherein the treated layer is formed beneath the hardmask.
 18. The method of claim 16, further comprising: depositing a series of alternating layers of silicon and silicon germanium to form the nanosheet stack; and forming an etch stop layer atop the series of alternating layers of silicon and silicon germanium, wherein the gate structure is formed over the etch stop layer.
 19. The method of claim 16, further comprising modifying the first and second areas of the gate material layer by amorphizing the first and second areas or by doping the first and second areas with an ion implant.
 20. The method of claim 16, further comprising performing a vertical ion implant to the gate structure to modify the first and second areas of the gate material layer, wherein the gate material layer is amorphous silicon. 